Guide to State-of-the-Art Electron Devices

Winner, 2013 PROSE Award, Engineering and Technology

Concise, high quality and comparative overview of state-of-the-art electron device development, manufacturing technologies and applications

Guide to State-of-the-Art Electron Devices marks the 60th anniversary of the IRE electron devices committee and the 35th anniversary of the IEEE Electron Devices Society, as such it defines the state-of-the-art of electron devices, as well as future directions across the entire field.

* Spans full range of electron device types such as photovoltaic devices, semiconductor manufacturing and VLSI technology and circuits, covered by IEEE Electron and Devices Society

* Contributed by internationally respected members of the electron devices community

* A timely desk reference with fully-integrated colour and a unique lay-out with sidebars to highlight the key terms

* Discusses the historical developments and speculates on future trends to give a more rounded picture of the topics covered

A valuable resource R&D managers; engineers in the semiconductor industry; applied scientists; circuit designers; Masters students in power electronics; and members of the IEEE Electron Device Society.

Autorentext
Edited by

Prof. Dr. Joachim N. Burghartz
Institute for Microelectronics Stuttgart, Germany

Klappentext
Guide to State-of-the-Art Electron Devices is written by 70 world-class specialists who share their expert views on a particular group of electron devices or device aspects. The book's release coincides with the 60th anniversary of the former Institute of Radio Engineers (IRE) electron devices committee and the 35th anniversary of IEEE Electron Devices Society (EDS). Seminal achievements in the field of electron devices are displayed in a history timeline that runs throughout the book. Key features Organized in a matrix of electron device types and cross-disciplines from photovoltaics and semiconductor manufacturing to VLSI technology and circuits A timely desk reference with fully-integrated colour and a unique lay-out with sidebars to highlight the key terms Contributed by IEEE Electron Devices Society (EDS) members from industry, academic and government institutions Discusses the historical developments and speculates on future trends to give a more rounded picture of the topics covered An essential reference for both present and prospective EDS members, this guide surveys the commonalities and interrelationships of all electron device types covered by the EDS. It will also appeal to affiliate IEEE members wishing to develop their expertise in electron devices.

Zusammenfassung
Winner, 2013 PROSE Award, Engineering and Technology Concise, high quality and comparative overview of state-of-the-art electron device development, manufacturing technologies and applications Guide to State-of-the-Art Electron Devices marks the 60th anniversary of the IRE electron devices committee and the 35th anniversary of the IEEE Electron Devices Society, as such it defines the state-of-the-art of electron devices, as well as future directions across the entire field. Spans full range of electron device types such as photovoltaic devices, semiconductor manufacturing and VLSI technology and circuits, covered by IEEE Electron and Devices Society Contributed by internationally respected members of the electron devices community A timely desk reference with fully-integrated colour and a unique lay-out with sidebars to highlight the key terms Discusses the historical developments and speculates on future trends to give a more rounded picture of the topics covered A valuable resource R&D managers; engineers in the semiconductor industry; applied scientists; circuit designers; Masters students in power electronics; and members of the IEEE Electron Device Society.

Inhalt
Foreword xi Preface xiii Contributors xvii Acknowledgments xix Introduction: Historic Timeline xxi PART I BASIC ELECTRON DEVICES 1 Bipolar Transistors 3
John D. Cressler and Katsuyoshi Washio 1.1 Motivation 3 1.2 The pn Junction and its Electronic Applications 5 1.3 The Bipolar Junction Transistor and its Electronic Applications 10 1.4 Optimization of Bipolar Transistors 15 1.5 Silicon-Germanium Heterojunction Bipolar Transistors 17 References 19 2 MOSFETs 21
Hiroshi Iwai, Simon Min Sze, Yuan Taur and Hei Wong 2.1 Introduction 21 2.2 MOSFET Basics 21 2.3 The Evolution of MOSFETs 27 2.4 Closing Remarks 31 References 31 3 Memory Devices 37
Kinam Kim and Dong Jin Jung 3.1 Introduction 37 3.2 Volatile Memories 39 3.3 Non-Volatile Memories 41 3.4 Future Perspectives of MOS Memories 43 3.5 Closing Remarks 45 References 46 4 Passive Components 49
Joachim N. Burghartz and Colin C. McAndrew 4.1 Discrete and Integrated Passive Components 49 4.2 Application in Analog ICs and DRAM 52 4.3 The Planar Spiral InductorA Case Study 54 4.4 Parasitics in Integrated Circuits 57 References 57 5 Emerging Devices 59
Supriyo Bandyopadhyay, Marc Cahay and Avik W. Ghosh 5.1 Non-Charge-Based Switching 59 5.2 Carbon as a Replacement for Silicon and the Rise of Grpahene Electronics and Moletronics 63 5.3 Closing Remarks 66 References 67 PART II ASPECTS OF DEVICE AND IC MANUFACTURING 6 Electronic Materials 71
James C. Sturm, Ken Rim, James S. Harris and Chung-Chih Wu 6.1 Introduction 71 6.2 Silicon Device Technology 71 6.3 Compound Semiconductor Devices 75 6.4 Electronic Displays 79 6.5 Closing Remarks 82 References 83 7 Compact Modeling 85
Colin C. McAndrew and Laurence W. Nagel 7.1 The Role of Compact Models 85 7.2 Bipolar Transistor Compact Modeling 87 7.3 MOS Transistor Compact Modeling 89 7.4 Compact Modeling of Passive Components 92 7.5 Benchmarking and Implementation 94 References 94 8 Technology Computer Aided Design 97
David Esseni, Christoph Jungemann, J¨urgen Lorenz, Pierpaolo Palestri, Enrico Sangiorgi and Luca Selmi 8.1 Introduction 97 8.2 Drift-Diffusion Model 98 8.3 Microscopic Transport Models 100 8.4 Quantum Transport Models 101 8.5 Process and Equipment Simulation 102 References 105 9 Reliability of Electron Devices, Interconnects and Circuits 107
Anthony S. Oates, Richard C. Blish, Gennadi Bersuker and Lu Kasprzak 9.1 Introduction and Background 107 9.2 Device Reliability Issues 109 9.3 Circuit-Level Reliability Issues 114 9.4 Microscopic Approaches to Assuring Reliability of ICs 117 References 117 10 Semiconductor Manufacturing 121
Rajendra Singh, Luigi Colombo, Klaus Schuegraf, Robert Doering and Alain Diebold 10.1 Introduction 121 10.2 Substrates 122 10.3 Lithography and Etching 122 10.4 Front-End Processing 124 10.5 Back-End Processing 125 10.6 Process Control 128 10.7 Assembly and Test 129 10.8 Future Directions 131 References 131 PART III APPLICATIONS BASED ON ELECTRON DEVICES 11 VLSI Technology and Circuits 135

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