Silicide Technology for Integrated Circuits

Klappentext Silicide Technology for Integrated Circuits focuses on the task of developing and applying metal silicide technology as it emerges from the scientific to the prototype and manufacturing stages and provides guidance on the application of the latest emerging technology. Zusammenfassung Silicide Technology for Integrated Circuits focuses on the task of developing and applying metal silicide technology as it emerges from the scientific to the prototype and manufacturing stages and provides guidance on the application of the latest emerging technology. Inhaltsverzeichnis Chapter 1: Silicides - an introduction Chapter 2: Silicide formation Chapter 3: Titanium silicide technology Chapter 4: Cobalt silicide technology Chapter 5: Nickel silicide technology Chapter 6: Light-emitting iron disilicide Chapter 7: Silicide contacts for Si/Ge devices Chapter 8: Silicide technology for SOI devices Chapter 9: Characterisation of metal silicides

Klappentext
Silicide Technology for Integrated Circuits focuses on the task of developing and applying metal silicide technology as it emerges from the scientific to the prototype and manufacturing stages and provides guidance on the application of the latest emerging technology.

Inhalt
Chapter 1: Silicides - an introduction Chapter 2: Silicide formation Chapter 3: Titanium silicide technology Chapter 4: Cobalt silicide technology Chapter 5: Nickel silicide technology Chapter 6: Light-emitting iron disilicide Chapter 7: Silicide contacts for Si/Ge devices Chapter 8: Silicide technology for SOI devices Chapter 9: Characterisation of metal silicides

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